Xi'an Jiaotong University Wiener Instrument Co., Ltd. successfully completed the "863" Program's major special topic on MEMS technology titled "Development and Practical Application of MEMS Pressure Sensors for Key Industries such as Petrochemicals." The project was officially accepted by an expert panel from the Ministry of Science and Technology, marking a significant milestone in China's advancement in micro-electro-mechanical systems.
MEMS, or Micro-Electro-Mechanical Systems, is an interdisciplinary field that combines miniaturized sensors, actuators, signal processing units, control circuits, interface systems, communication modules, and power sources. This cutting-edge technology has become a crucial area of research with broad applications across various industries.
The project was jointly developed by Xi'an Jiaotong University Wiener Instrument Co., Ltd., Beijing Qingbird Yuanxin Microsystems Technology Co., Ltd., and Huazhong University of Science and Technology, with a total investment of 10.5 million yuan. The goal of the project was to address the specific needs of stress testing in critical sectors such as petrochemicals, defense, energy, and automotive industries.
The developed MEMS pressure sensors are capable of operating across a wide range of pressures and temperatures, from -30°C to 200°C, making them suitable for harsh environments. The project focused on overcoming challenges related to mass production and practical implementation, aiming to bring these advanced sensors to market efficiently.
This achievement is expected to accelerate the development of high-temperature pressure sensors in China, facilitating their commercialization and industrial application in key sectors. It represents a major step forward in enhancing domestic capabilities in MEMS technology and supporting the growth of high-tech industries in the country.
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