Recently, a special project for the development of major national scientific instruments and equipment, led by Shanghai Metrology Engineering Equipment Supervision Co., Ltd., a wholly-owned subsidiary of Shanghai Institute of Measurement and Testing Technology, "Development and Application of Cross-scale Micro-nano Meters (2014YQ090709)" The meeting was held in the hospital. The meeting was presided over by Xie Zhengwen, deputy director of Science and Technology Department of AQSIQ; Wang Yuewei, deputy director of the Science and Technology Department of AQSIQ; Qian Xiaoyong, director of the capital department of the Ministry of Science and Technology; director Hao Yuemin of Shanghai Science and Technology Commission; Supervisor, Chief Engineer Lu Min of Shanghai Bureau of Quality Supervision, Director Zhu Chenhui, Academician Jin Guofan, Academician Zhuang Songlin, Academician Li Tongbao, President Shao Li of Shanghai Institute of Measurement and Testing Technology, and all members of the project team attended the meeting.

At the meeting, Xie Zhengwen, Deputy Director informed the National Major Scientific Instruments and Equipment Development Project 2016 mid-term assessment results. This time a total of 29 projects to participate in the assessment, the project's mid-term assessment integrated rank A, becoming the only one of five A-type projects. The leaders and experts at the conference all congratulated the project for such a high score!

Project Leader Shao Li briefed the participating leaders and experts on the project progress, demonstrated the project achievements, and reported the next phase of the work plan and series of prototype planning. This project has developed a high-precision cross-scale micro-nano meter, a universal cross-scale micro-nano meter two (assembly), performance indicators and related parameters are in line with the Ministry of Science and project legislation requirements. In addition, the research and development equipment of the project has been applied in the preparation and testing of nano-standard samples, the micro-mesoscopic structure testing of ultra-precision processing materials, the testing of IC wafers and the detection of environmental particulate matter.

Participant leaders, expert groups, supervision groups and user committee members are optimistic about the development and application prospects of the project, it is recommended to strengthen the project follow-up engineering, industrialization, and further improve the stability and reliability of the instrument, focus on 1-2 Better field research and development of specialized applications.

Deputy Director Wang Yuewei pointed out that we should pay attention to the issue of intellectual property rights and make the high-end Chinese-made instruments really marketed through in-depth excavation of the real key points of demand and the introduction of professional marketing personnel at a later stage.

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