Laser Interferometer Escorts High-end Manufacturing

Leading Word: China's industrial development and upgrading make microelectronics, micro-mechanics, optics, and modern ultra-precision processing industries increasingly demanding detection accuracy, while requiring a larger detection range, while other detection methods are difficult to perform, only laser interference detection Technology can achieve high measurement accuracy in a large number of processes, so it is widely used in high-end manufacturing.

The SJ6000 laser interferometer introduced by Sinopharm Instrument Co., Ltd. adopts imported high-stabilization helium-needed lasers, dual longitudinal mode thermal stabilization technology, multi-parameter environmental compensation technology, and high-speed digital signal processing systems, etc., and is realized by combining with different optical components. Measurements of geometric accuracy such as straightness, perpendicularity, angle, flatness, and parallelism. It is the most commonly used standard instrument for calibrating the accuracy and linearity of CNC machine tools, coordinate measuring machines and other positioning devices.

1. Application in verification of CNC machine tools

SJ6000 laser interferometer can be used for precision machine tool positioning accuracy, repeatability positioning accuracy, micro-displacement accuracy measurement, providing the basis for machine tool error correction. The software has 10 built-in machine tool inspection standards. The use of a laser interferometer to detect various errors in the machine tool and correct it is a difficult technique to achieve with traditional measurement methods, and is a key measure to greatly improve the machining accuracy of CNC machine tools.

2, in the three coordinate detection application

The SJ6000 laser interferometer with its mirror set and accessories can detect the displacement accuracy, straightness, and verticality of the coordinate measuring machine. With the increasing demand for processing speed in the contemporary manufacturing industry, the dynamic errors caused by the structural deformation of the three coordinate measuring machines due to high-speed operation cannot be ignored. The use of a laser interferometer to perform static error and dynamic error measurement and compensation on the coordinate measuring machine is of great significance for improving the measurement accuracy.

3, in the displacement sensor application

The use of laser interferometer for the detection of displacement sensors has become a trend. Its characteristics are fast response and high measurement accuracy. It is an important means for high-precision calibration of displacement sensors.

4, application with other mirror groups

The SJ6000 laser interferometer combines with different optical components to measure parameters such as distance, angle, straightness, verticality, parallelism, and flatness, with extremely high accuracy and efficiency.

SJ6000 laser interferometer technical parameters:

Technical Linear Length Accuracy: ±0.5ppm (0~40°C)

Laser frequency stabilization accuracy: 0.05ppm

Resolution: 0.001um

Source: Shenzhen Zhongtu Instrument Technology Co., Ltd.